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EE C245/ME C218: Introduction to MEMS Design (Fall 2012, UC Berkeley). Instructor: Professor Clark Tu-Cuong Nguyen.
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Description
This course provides an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.
Course content
- Lecture 01 – Admin & Overview, Introduction to MEMS Unlimited
- Lecture 02 – Benefits of Scaling I: GHz Micromechanical Resonators Unlimited
- Lecture 04 – Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits Unlimited
- Lecture 05 – Benefits of Scaling III: Thermal Circuits (cont.) Unlimited
- Lecture 06 – Benefits of Scaling III, Fabrication Process Modules I: Oxidation, Film Deposition Unlimited
- Lecture 07 – Fabrication Process Modules II: Film Deposition (cont.), Lithography, Etching Unlimited
- Lecture 08 – Fabrication Process Modules III: Etching (cont.), Semiconductor Doping Unlimited
- Lecture 09 – Surface Micromachining I: Polysilicon Surface Micromachining Unlimited
- Lecture 11 – Surface Micromachining (cont.), Bulk Micromachining Unlimited
- Lecture 12 – Bulk Micromachining (cont.), Mechanics of Materials for MEMS Unlimited
- Lecture 13 – Mechanics of Materials for MEMS (cont.) Unlimited
- Lecture 14 – Mechanics of Materials for MEMS (cont.), Beam Bending Unlimited
- Lecture 15 – Beam Bending: Stress Gradients in Cantilevers, Folded-Beam Suspension Unlimited
- Lecture 16 – Beam Combos: Folded-Beam Suspension (cont.) Unlimited
- Lecture 17 – Beam Combos: Design Implications of Residual Stress and Stress Gradients Unlimited
- Lecture 18 – Energy Methods, Resonance Frequency Unlimited
- Lecture 19 – Resonance Frequency (cont.) Unlimited
- Lecture 20 – Equivalent Circuits, Capacitive Transducers Unlimited
- Lecture 21 – Capacitive Transducers (cont.) Unlimited
- Lecture 22 – Electrical Stiffness Unlimited
- Lecture 24 – Comb Drive & Equivalent Circuits II Unlimited
- Lecture 25 – Equivalent Circuits II (cont.), Gyroscopes Unlimited
- Lecture 26 – Gyroscopes and Sensing Circuits Unlimited
- Lecture 27 – Sensing Circuits Unlimited
Instructor
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