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This course introduces the theory and technology of micro/nano fabrication.
0
English
English [CC]
FREE
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Description
Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology
Course content
- Overview/Safety/Lab Assignment Unlimited
- IC Lab – Overview Unlimited
- Diffusion Unlimited
- IC Lab: Testing Unlimited
- CI-M: Writing Technical Reports Unlimited
- Diffusion/Implantation Unlimited
- MEMS Lab: Overview Unlimited
- Vacuum System Unlimited
- CVD Unlimited
- Sputtering Unlimited
- CI-M: Feedback on IC Report, Reports Returned Unlimited
- Evaporation Unlimited
- MEMS Lab: Testing Unlimited
- Etching (Wet) Unlimited
- Etching (Dry) Unlimited
- Fluids Lab: Testing Unlimited
- Take Home Introduction / Patents Unlimited
- Take Home Discussion Unlimited
Instructor
Massachusetts Institute of Technology
5
5
1
1916
1520
