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VLSI Technology. Instructor: Dr. Nandita Dasgupta, Department of Electrical Engineering, IIT Madras. VLSI (Very Large Scale Integration or Very Large Scale Integrated Circuits) is the process of creating an integrated circuit (IC) by combining hundreds of thousands of transistors or devices into a single chip.
FREE
This course includes
Hours of videos
1111 years
Units & Quizzes
40
Unlimited Lifetime access
Access on mobile app
Certificate of Completion
This course covers lessons in bipolar junction transistor fabrication, crystal structure, crystal growth, epitaxy, oxidation, diffusion, lithography, etching, metallization, bipolar junction transistor, MOSFET, CMOS and BiCMOS technology. (from nptel.ac.in)
Course Currilcum
- Lecture 01 – Introduction Unlimited
- Lecture 02 – Bipolar Junction Transistor (BJT) Fabrication Unlimited
- Lecture 03 – MOSFET Fabrication for IC Unlimited
- Lecture 04 – Crystal Structure of Silicon Unlimited
- Lecture 05 – Crystal Structure of Silicon (cont.) Unlimited
- Lecture 06 – Defects in Crystal, Crystal Growth Unlimited
- Lecture 07 – Crystal Growth (cont.), Epitaxy: Vapour Phase Epitaxy Unlimited
- Lecture 08 – Epitaxy: Vapour Phase Epitaxy, Doping during Epitaxy Unlimited
- Lecture 09 – Epitaxy: Doping during Epitaxy (cont.) Unlimited
- Lecture 10 – Epitaxy: Molecular Beam Epitaxy, Oxication Unlimited
- Lecture 11 – Oxidation I – Kinetics of Oxidation Unlimited
- Lecture 12 – Oxidation II – Oxidation Rate Constants Unlimited
- Lecture 13 – Oxidation III – Dopant Redistribution Unlimited
- Lecture 14 – Oxidation IV – Oxide Charges and Oxidation Systems Unlimited
- Lecture 15 – Diffusion I – Theory of Diffusion and Fick’s Laws Unlimited
- Lecture 16 – Diffusion II- Infinite Source and Constant Impurity Diffusion Unlimited
- Lecture 17 – Diffusion III – Actual Doping Profile Unlimited
- Lecture 18 – Diffusion IV – Diffusion Systems Unlimited
- Lecture 19 – Ion Implantation Process and Stopping Mechanisms Unlimited
- Lecture 20 – Ion Implantation Systems and Damages during Implantation Unlimited
- Lecture 21 – Annealing of Damages created by Ion Implantations Unlimited
- Lecture 22 – Masking during Implantation, Characterization of Doped Layers Unlimited
- Lecture 23 – Lithography: Optical Lithography Unlimited
- Lecture 24 – Lithography: Electron Beam Lithography, X-ray Lithography Unlimited
- Lecture 25 – Wet Chemical Etching Unlimited
- Lecture 26 – Dry Etching Unlimited
- Lecture 27 – Plasma Etching Systems Unlimited
- Lecture 28 – Etching of Si, SiO2, SiN and Other Materials Unlimited
- Lecture 29 – Plasma Deposition Process Unlimited
- Lecture 30 – Metallization Unlimited
- Lecture 31 – Problems in Aluminium Metal Contacts Unlimited
- Lecture 32 – IC BJT – From Junction Isolation to LOCOS (LOCal Oxidation of Silicon) Unlimited
- Lecture 33 – Problems in LOCOS + Trench Isolation and Selective Epitaxy Unlimited
- Lecture 34 – More about BJT Fabrication and Realization of PNP Transistor Unlimited
- Lecture 35 – I2L Circuits + Transistors in ECL Circuits Unlimited
- Lecture 36 – MOSFET I – Metal Gate vs Self-aligned Poly Gate Unlimited
- Lecture 37 – MOSFET II – Tailoring of Device Parameters Unlimited
- Lecture 38 – CMOS Technology Unlimited
- Lecture 39 – Latch up in CMOS Unlimited
- Lecture 40 – BiCMOS technology Unlimited
