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Last updated:

October 10, 2022

Duration:

Unlimited Duration

FREE

This course includes:

Unlimited Duration

Badge on Completion

Certificate of completion

Unlimited Duration

Description

6.777J / 2.372J is an introduction to microsystem design.

Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Course Curriculum

  • Introduction to MEMS; microfabrication for MEMS: part I Unlimited
  • Microfabrication for MEMS: part II Unlimited
  • Microfabrication for MEMS: part III Unlimited
  • Microfabrication for MEMS: part IV; in-class fab problem Unlimited
  • Fabrication for the life sciences; material properties Unlimited
  • Elasticity Unlimited
  • Structures Unlimited
  • Lumped-element modeling Unlimited
  • Energy-conserving transducers Unlimited
  • Dynamics, especially nonlinear Unlimited
  • Structures special topics Unlimited
  • Thermal energy domain; dissipation Unlimited
  • Modeling dissipative processes Unlimited
  • Fluids 1 Unlimited
  • Fluids 2 Unlimited
  • Mass transport in liquids Unlimited
  • Feedback Unlimited
  • Noise Unlimited
  • Packaging Unlimited
  • In-class design problem Unlimited
  • Design tradeoffs Unlimited
  • Power MEMS case study Unlimited
  • Optical MEMS case study Unlimited
  • Capacitive accelerometer case study Unlimited
  • BioMEMS case study Unlimited

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Massachusetts Institute of Technology