The electron microprobe provides a complete micrometer-scale quantitative chemical analysis of inorganic solids.
The method is nondestructive and utilizes characteristic X-rays excited by an electron beam incident on a flat surface of the sample. This course provides an introduction to the theory of X-ray microanalysis through wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and scanning electron imaging with back-scattered electron (BSE), secondary electron (SE), X-ray using WDS or EDS (elemental mapping), and cathodoluminescence (CL). Lab sessions involve hands-on use of the JEOL JXA-8200 Superprobe
- Introduction; electron-specimen interactions Unlimited
- X-ray generation, emission, Unlimited
- Quantitative analysis using WDS Unlimited
- Matrix (ZAF) corrections in quantitative analysis; φ(ρz) corrections Unlimited
About the instructor