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Last updated:

September 25, 2023

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Description

Fabrication Techniques for Mems-based Sensors: Clinical Perspective. Instructor: Prof. Hardik J. Pandya, Department of Electronic Systems Engineering, IISc Bangalore.

This course is designed with an aim of educating students in the area of microtechnology and its use to fabricate sensors and systems. The students will have an exposure to sensors and its importance in the real world. The students will also able to understand how to fabricate some of those sensors. Several examples of engineering devices used in clinical research will be also covered. Class 10000 non-conventional clean room and some equipment within it will also be shown. Below are some of the course outcomes. Ability to understand microfabrication process Understand sensors used in electronics and biomedical areas Understand Clean Room (Class 1 to Class 10000) Understand Microengineering Technology Design the process flow for fabricating microheater required in gas sensors. Design the process flow for fabricating forces sensors for biomedical application. Design microheater for gas sensors as per specifications. Design force sensors as per specifications. Understand fabrication of microfluidic platforms, micro-cantilevers, flexible force sensors, interdigitated electrodes, polymer-glass bonding etc. for clinical research. (from nptel.ac.in)

Course Curriculum

    • Lecture 01 – Introduction to Microengineering Devices Unlimited
    • Lecture 02 – Introduction to Microengineering Devices (cont.) Unlimited
    • Lecture 03 – Introduction to Microengineering Devices (cont.) Unlimited
    • Lecture 04 – Silicon, Silicon Dioxide and Photolithography Unlimited
    • Lecture 05 – Silicon, Silicon Dioxide and Photolithography (cont.) Unlimited
    • Lecture 06 – Physical Vapour Deposition Unlimited
    • Lecture 07 – Physical Vapour Deposition (cont.) Unlimited
    • Lecture 09 – Mask Aligner Unlimited
    • Lecture 12 – Micromachining: Fabrication of VOC Sensor Unlimited
    • Lecture 13 – Micromachining: Fabrication of VOC Sensor (cont.) Unlimited
    • Lecture 14 – Micromachining: Fabrication of VOC Sensor and Cantilever Unlimited
    • Lecture 15 – Chemical Vapour Deposition Unlimited
    • Lecture 16 – Typical Microfabricated Devices for Biomedical Applications Unlimited
    • Lecture 17 – Cancer Diagnostic Tool Unlimited
    • Lecture 18 – Process Flow for Fabrication of Micro Heater Unlimited
    • Lecture 19 – Process Flow for Fabrication of Interdigitated Electrodes Unlimited
    • Lecture 20 – Process Flow for Fabrication of Interdigitated Electrodes (cont.) Unlimited
    • Lecture 21 – Process Flow for Fabrication of ETM Phenotyping Unlimited
    • Lecture 22 – Process Flow for Fabrication of Piezo Cantilever Unlimited
    • Lecture 23 – Electro-mechanical Phenotyping of Breast Cancer using Flexible MEMS Unlimited
    • Lecture 24 – Interdigitated Electrodes in SU-8 Well Unlimited
    • Lecture 25 – Microfluidic Chip for Evaluating the Efficacy of Immunotherapy Drugs Unlimited
    • Lecture 26 – Microfluidic Chip for Evaluating the Efficacy of Immunotherapy Drugs (cont.) Unlimited
    • Lecture 27 – Microchip for Rapid Drug Screening Unlimited
    • Lecture 28 – Microchip for Rapid Drug Screening (cont.) Unlimited
    • Lecture 29 – A Microfluidic Chip for Rapid Bacterial Antibiotic Susceptibility Testing Unlimited
    • Lecture 30 – Smart Catheter Unlimited
    • Lecture 31 – Smart Catheter: Flexible Force Sensor Unlimited
    • Lecture 32 – Smart Catheter: Flexible Force Sensor (cont.) Unlimited
    • Lecture 33 – Tissue and Cell Culture Techniques Unlimited
    • Lecture 34 – Clean Room: Equipments Required Unlimited
    • Lecture 35 – GLP: Gowning Procedure for using Lab Unlimited
    • Lecture 36 – Introduction to Equipments: Refrigerator Unlimited
    • Lecture 37 – Gowning Procedure for using Biological Lab Setup Unlimited
    • Lecture 38 – Introduction to Equipments: Desiccator Unlimited
    • Lecture 39 – Introduction to Equipments: Impedance Analyzer Unlimited
    • Lecture 40 – Introduction to Equipments: DAQ Unlimited
    • Lecture 41 – Function generator, Multimeter, Sampling, LabVIEW, NI-CDAQ Unlimited
    • Lecture 42 – Introduction to Equipments: Stereo Microscope Unlimited
    • Lecture 43 – Introduction to Equipments: Metallurgical Microscope Unlimited
    • Lecture 44 – Introduction to Equipments: Inverted Microscope Unlimited
    • Lecture 45 – Introduction to Equipments: Fire Alarm Unlimited
    • Lecture 46 – Introduction to Equipments: Bio-safety Hood Unlimited
    • Lecture 47 – Introduction to Equipments: Peristaltic Pump Unlimited
    • Lecture 48 – Introduction to Equipments: Incubator Unlimited
    • Lecture 49 – Introduction to Equipments: Oven Unlimited
    • Lecture 50 – Introduction to Equipments: Micromanipulator Unlimited
    • Lecture 51 – PDMS Moulding Unlimited
    • Lecture 52 – 3D Printing Unlimited
    • Lecture 53 – Introduction to Fabricated Sensors Unlimited
    • Lecture 54 – Simulation: Electro- Thermo- Mechanical Properties of Micro-heater Unlimited
    • Lecture 55 – Simulation: Electro- Thermo- Mechanical Properties of Micro-heater (cont.) Unlimited

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