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Last updated:

September 25, 2023

Duration:

Unlimited Duration

FREE

This course includes:

Unlimited Duration

Badge on Completion

Certificate of completion

Unlimited Duration

Description

Fundamentals of Micro and Nanofabrication. Instructors: Prof. Sushobhan Avasti and Prof. Shankar Selvaraja, Centre for Nano Science and Engineering, IISc Bangalore.

The course provides an in-depth understanding of top-down device fabrication. Focus is the unit processes typically used in micro and nanofabrication of devices. Both concepts and practical aspects are covered. Topics include crystal growth, doping, chemical vapor deposition, physical vapor deposition, photolithography, wet etching, dry etching, and packaging. The course is accessible to students from diverse backgrounds, such as materials, physics, chemistry, mechanical engineering, and electrical engineering. (from nptel.ac.in)

Course Curriculum

    • Lecture 01 – Introduction Unlimited
    • Lecture 02 – Substrate Unlimited
    • Lecture 03 – Substrate (cont.) Unlimited
    • Lecture 04 – Introduction to Clean Room Unlimited
    • Lecture 05 – Contamination and Surface Cleaning Unlimited
    • Lecture 06 – Advanced Cleaning Techniques Unlimited
    • Lecture 07 – Defects Unlimited
    • Lecture 08 – Diffusion Unlimited
    • Lecture 09 – Diffusion (Advanced Concepts) Unlimited
    • Lecture 10 – Ion Implantation Unlimited
    • Lecture 11 – Ion Implantation (cont.) Unlimited
    • Lecture 12 – Native Films Unlimited
    • Lecture 13 – Native Films (Advanced Concepts) Unlimited
    • Lecture 14 – Native Films: Defects at Si/SiO2 Interface Unlimited
    • Lecture 15 – Methods and Some Definitions Unlimited
    • Lecture 16 – Chemical Vapor Deposition: Basics Unlimited
    • Lecture 17 – Chemical Vapor Deposition: Precursor Transport Unlimited
    • Lecture 18 – Chemical Vapor Deposition: Types of CVD Equipment Unlimited
    • Lecture 19 – Chemical Vapor Deposition: Nucleation and Growth Unlimited
    • Lecture 20 – Chemical Vapor Deposition: Other Details Unlimited
    • Lecture 21 – Atomic Layer Deposition Unlimited
    • Lecture 22 – Atomic Layer Deposition (cont.) Unlimited
    • Lecture 23 – Physical Vapor Deposition: Basics Unlimited
    • Lecture 24 – Physical Vapor Deposition: Evaporation Unlimited
    • Lecture 25 – Physical Vapor Deposition: Sputtering Unlimited
    • Lecture 26 – Metallization: Contact Resistance Unlimited
    • Lecture 27 – Metallization: Electromigration and Epilogue Unlimited
    • Lecture 28 – Pattern Transfer Basics Unlimited
    • Lecture 29 – Optical Lithography Basics: Resist Process 1 Unlimited
    • Lecture 30 – Optical Lithography Basics: Resist Process 2 Unlimited
    • Lecture 31 – Optical Lithography: Contact and Proximity Printing Unlimited
    • Lecture 32 – Optical Lithography: Stepper and Scanner Unlimited
    • Lecture 33 – Projection Lithography: Image Formation Basics Unlimited
    • Lecture 34 – Projection Lithography: Image Formation in Photoresist Unlimited
    • Lecture 35 – Optical Lithography: Surface Reflection Unlimited

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