EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen.
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Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.
Course Currilcum
- Lecture 01 – Admin & Course Overview Unlimited
- Lecture 02 – Benefits of Scaling I: GHz Micromechanical Resonators Unlimited
- Lecture 03 – Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits Unlimited
- Lecture 04 – Benefits of Scaling III: Thermal Circuits (cont.) Unlimited
- Lecture 05 – Benefits of Scaling III (cont.), Fabrication Process Modules Unlimited
- Lecture 06 – Fabrication Process Modules, Surface Micromachining Unlimited
- Lecture 07 – Surface Micromachining (cont.) Unlimited
- Lecture 08 – Surface Micromachining (cont.), Bulk Micromachining Unlimited
- Lecture 09 – Bulk Micromachining (cont.), Mechanics of Materials for MEMS I Unlimited
- Lecture 10 – Mechanics of Materials for MEMS II, Beam Bending Unlimited
- Lecture 11 – Beam Bending (cont.) Unlimited
- Lecture 12 – Beam Combos (cont.) Unlimited
- Lecture 13 – Beam Combos (cont.), Energy Methods Unlimited
- Lecture 14 – Resonance Frequency Unlimited
- Lecture 15 – Resonance Frequency (cont.), Equivalent Circuits Unlimited
- Lecture 16 – Equivalent Circuits (cont.), Capacitive Transducers Unlimited
- Lecture 17 – Capacitive Transducers (cont.) Unlimited
- Lecture 18 – Capacitive Transducers (cont.) Unlimited
- Lecture 19 – Equivalent Circuits II Unlimited
- Lecture 22 – Sensing Non-Idealities and Integration Unlimited
- Lecture 24 – Equivalent Input-Referred Noise & MDS (Minimum Detectable Signal) Unlimited
- Lecture 25 – Gyro Noise and MDS (Minimum Detectable Signal) Unlimited
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