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EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen.

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September 23, 2023

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September 23, 2023

Duration:

Unlimited Duration

FREE

This course includes:

Unlimited Duration

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Certificate of completion

Unlimited Duration

Description

EE C247B/ME C218: Introduction to MEMS Design (Spring 2015, UC Berkeley). Instructor: Professor Clark Tu-cuong Nguyen.

Introduction to MEMS Design - Physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS. Design project is required. This course is the same as Mechanical Engineering C218.

Course Curriculum

  • Lecture 01 – Admin & Course Overview Unlimited
  • Lecture 02 – Benefits of Scaling I: GHz Micromechanical Resonators Unlimited
  • Lecture 03 – Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits Unlimited
  • Lecture 04 – Benefits of Scaling III: Thermal Circuits (cont.) Unlimited
  • Lecture 05 – Benefits of Scaling III (cont.), Fabrication Process Modules Unlimited
  • Lecture 06 – Fabrication Process Modules, Surface Micromachining Unlimited
  • Lecture 07 – Surface Micromachining (cont.) Unlimited
  • Lecture 08 – Surface Micromachining (cont.), Bulk Micromachining Unlimited
  • Lecture 09 – Bulk Micromachining (cont.), Mechanics of Materials for MEMS I Unlimited
  • Lecture 10 – Mechanics of Materials for MEMS II, Beam Bending Unlimited
  • Lecture 11 – Beam Bending (cont.) Unlimited
  • Lecture 12 – Beam Combos (cont.) Unlimited
  • Lecture 13 – Beam Combos (cont.), Energy Methods Unlimited
  • Lecture 14 – Resonance Frequency Unlimited
  • Lecture 15 – Resonance Frequency (cont.), Equivalent Circuits Unlimited
  • Lecture 16 – Equivalent Circuits (cont.), Capacitive Transducers Unlimited
  • Lecture 17 – Capacitive Transducers (cont.) Unlimited
  • Lecture 18 – Capacitive Transducers (cont.) Unlimited
  • Lecture 19 – Equivalent Circuits II Unlimited
  • Lecture 22 – Sensing Non-Idealities and Integration Unlimited
  • Lecture 24 – Equivalent Input-Referred Noise & MDS (Minimum Detectable Signal) Unlimited
  • Lecture 25 – Gyro Noise and MDS (Minimum Detectable Signal) Unlimited

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