0

(

ratings

)

students

Created by:

Profile Photo

Last updated:

September 25, 2023

Duration:

Unlimited Duration

FREE

This course includes:

Unlimited Duration

Badge on Completion

Certificate of completion

Unlimited Duration

Description

EE C245/ME C218: Introduction to MEMS Design (Fall 2012, UC Berkeley). Instructor: Professor Clark Tu-Cuong Nguyen.

This course provides an introduction to physics, fabrication, and design of micro-electromechanical systems (MEMS). Micro and nanofabrication processes, including silicon surface and bulk micromachining and non-silicon micromachining. Integration strategies and assembly processes. Microsensor and microactuator devices: electrostatic, piezoresistive, piezoelectric, thermal, magnetic transduction. Electronic position-sensing circuits and electrical and mechanical noise. CAD for MEMS.

Course Curriculum

  • Lecture 01 – Admin & Overview, Introduction to MEMS Unlimited
  • Lecture 02 – Benefits of Scaling I: GHz Micromechanical Resonators Unlimited
  • Lecture 04 – Benefits of Scaling II: Chip-Scale Atomic Clocks, Thermal Circuits Unlimited
  • Lecture 05 – Benefits of Scaling III: Thermal Circuits (cont.) Unlimited
  • Lecture 06 – Benefits of Scaling III, Fabrication Process Modules I: Oxidation, Film Deposition Unlimited
  • Lecture 07 – Fabrication Process Modules II: Film Deposition (cont.), Lithography, Etching Unlimited
  • Lecture 08 – Fabrication Process Modules III: Etching (cont.), Semiconductor Doping Unlimited
  • Lecture 09 – Surface Micromachining I: Polysilicon Surface Micromachining Unlimited
  • Lecture 11 – Surface Micromachining (cont.), Bulk Micromachining Unlimited
  • Lecture 12 – Bulk Micromachining (cont.), Mechanics of Materials for MEMS Unlimited
  • Lecture 13 – Mechanics of Materials for MEMS (cont.) Unlimited
  • Lecture 14 – Mechanics of Materials for MEMS (cont.), Beam Bending Unlimited
  • Lecture 15 – Beam Bending: Stress Gradients in Cantilevers, Folded-Beam Suspension Unlimited
  • Lecture 16 – Beam Combos: Folded-Beam Suspension (cont.) Unlimited
  • Lecture 17 – Beam Combos: Design Implications of Residual Stress and Stress Gradients Unlimited
  • Lecture 18 – Energy Methods, Resonance Frequency Unlimited
  • Lecture 19 – Resonance Frequency (cont.) Unlimited
  • Lecture 20 – Equivalent Circuits, Capacitive Transducers Unlimited
  • Lecture 21 – Capacitive Transducers (cont.) Unlimited
  • Lecture 22 – Electrical Stiffness Unlimited
  • Lecture 24 – Comb Drive & Equivalent Circuits II Unlimited
  • Lecture 25 – Equivalent Circuits II (cont.), Gyroscopes Unlimited
  • Lecture 26 – Gyroscopes and Sensing Circuits Unlimited
  • Lecture 27 – Sensing Circuits Unlimited

About the instructor

5 5

Instructor Rating

6

Reviews

4637

Courses

24151

Students

Profile Photo
OpenCoursa
We are an educational and skills marketplace to accommodate the needs of skills enhancement and free equal education across the globe to the millions. We are bringing courses and trainings every single day for our users. We welcome everyone woth all ages, all background to learn. There is so much available to learn and deliver to the people.