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Created by:
Last updated:
September 25, 2023
Duration:
Unlimited Duration
FREE
This course includes:
Unlimited Duration
Badge on Completion
Certificate of completion
Unlimited Duration
Description
MEMS and Microsystems. Instructor: Prof. Santiram Kal, Department of Electronics and Electrical Communication Engineering, IIT Kharagpur.
This course covers lessons in micro sensors, MEMS materials and its properties, micro electronic and micromachining technology for MEMS, etch stop techniques, microstereolithography, MEMS accelerometers and inertial sensors, interface electronics for MEMS and BIO-MEMS. (from nptel.ac.in)
Course Curriculum
- Lecture 01 – Introduction to MEMS and Microsystems Unlimited
- Lecture 02 – Introduction to Microsensors Unlimited
- Lecture 03 – Evaluation of MEMS, Microsensors, Market Survey Unlimited
- Lecture 04 – Applications of MEMS Unlimited
- Lecture 05 – MEMS Materials Unlimited
- Lecture 06 – Properties of MEMS Materials Unlimited
- Lecture 07 – Properties of MEMS Materials (cont.), Microelectronic Technology for MEMS Unlimited
- Lecture 08 – Microelectronic Technology for MEMS: Thin Film Deposition: Evaporation, Oxidation Unlimited
- Lecture 09 – Microelectronic Technology for MEMS: Lithography, Diffusion, Ion Implantation Unlimited
- Lecture 10 – Micromachining Technology for MEMS Unlimited
- Lecture 11 – Micromachining Process Unlimited
- Lecture 12 – Etch Stop Techniques and Microstructure Fabrication Unlimited
- Lecture 13 – Surface and Quartz Micromachining Unlimited
- Lecture 14 – Fabrication of Micromachined Microstructure Devices Unlimited
- Lecture 15 – Microstereolithography Unlimited
- Lecture 16 – MEMS Microsensors Thermal Unlimited
- Lecture 17 – Micromachined Microsensors Mechanical Unlimited
- Lecture 18 – MEMS Pressure and Flow Sensors Unlimited
- Lecture 19 – Micromachined Flow Sensors Unlimited
- Lecture 20 – MEMS Inertial Sensors Unlimited
- Lecture 21 – Micromachined Micro Accelerometers for MEMS Unlimited
- Lecture 22 – MEMS Accelerometers for Avionics Unlimited
- Lecture 23 – Temperature Drift and Damping Analysis Unlimited
- Lecture 24 – Piezoresistive Accelerometer Technology Unlimited
- Lecture 25 – MEMS Capacitive Accelerometer Unlimited
- Lecture 26 – MEMS Capacitive Accelerometer Process Unlimited
- Lecture 27 – MEMS Gyro Sensors Unlimited
- Lecture 28 – MEMS for Space Applications Unlimited
- Lecture 29 – Polymer MEMS and Carbon Nanotubes Unlimited
- Lecture 30 – Wafer Bonding and Packaging of MEMS Unlimited
- Lecture 31 – Interface Electronics for MEMS Unlimited
- Lecture 32 – MEMS for Biomedical Applications Unlimited
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