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Last updated:

December 2, 2022

Duration:

Unlimited Duration

FREE

This course includes:

Unlimited Duration

Badge on Completion

Certificate of completion

Unlimited Duration

Description

This course introduces the theory and technology of micro/nano fabrication.

Lectures and laboratory sessions focus on basic processing techniques such as diffusion, oxidation, photolithography, chemical vapor deposition, and more. Through team lab assignments, students are expected to gain an understanding of these processing techniques, and how they are applied in concert to device fabrication. Students enrolled in this course have a unique opportunity to fashion and test micro/nano-devices, using modern techniques and technology

Course Curriculum

  • Overview/Safety/Lab Assignment Unlimited
  • IC Lab – Overview Unlimited
  • Diffusion Unlimited
  • IC Lab: Testing Unlimited
  • CI-M: Writing Technical Reports Unlimited
  • Diffusion/Implantation Unlimited
  • MEMS Lab: Overview Unlimited
  • Vacuum System Unlimited
  • CVD Unlimited
  • Sputtering Unlimited
  • CI-M: Feedback on IC Report, Reports Returned Unlimited
  • Evaporation Unlimited
  • MEMS Lab: Testing Unlimited
  • Etching (Wet) Unlimited
  • Etching (Dry) Unlimited
  • Fluids Lab: Testing Unlimited
  • Take Home Introduction / Patents Unlimited
  • Take Home Discussion Unlimited

About the instructor

5 5

Instructor Rating

1

Reviews

1520

Courses

1916

Students

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Massachusetts Institute of Technology