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6.780 covers statistical modeling and the control of semiconductor fabrication processes and plants.
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English
English [CC]
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Description
Topics covered include: design of experiments, response surface modeling, and process optimization; defect and parametric yield modeling; process/device/circuit yield optimization; monitoring, diagnosis, and feedback control of equipment and processes; and analysis and scheduling of semiconductor manufacturing operations.
Course content
- Overview of Semiconductor Manufacturing Unlimited
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- Statistics Review: Distributions Unlimited
- Statistics Review: Estimation Unlimited
- Hypothesis Tests and Control Chart Introduction Unlimited
- Advanced Control Charts, Nested Variance Unlimited
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- Analysis and Design of Experiments Unlimited
- MANOVA, Factorial Experiments Unlimited
- Design of Experiments and Response Surface Modeling Unlimited
- RSM and Regression Unlimited
- Scheduling Unlimited
- Factory Design and Efficiency Unlimited
Instructor
Massachusetts Institute of Technology
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1916
1520
